| #1 | Journal of vacuum science and technology, B, Nanotechnology & microelectronics. -- New York : American Institute of Physics, 2010-. -- ISSN 2166-2746 print. -- ISSN 2166-2754 online |
| #2 | Journal of vacuum science and technology. -- New York : American Institute of Physics, 1964-1982. -- ISSN 0022-5355 |
| #3 | Journal of vacuum science & technology, A, Vacuum, surfaces, and films. -- Melville : American Institute of Physics, 1983-. -- ISSN 0734-2101 print. -- ISSN 1520-8559 online |
| #4 | Journal of vacuum science & technology, B, Microelectronics and nanometer structures. -- Melville : American Institute of Physics, 1983-2010. -- ISSN 1071-1023 print. -- ISSN 1520-8567 online |