| Název |
Journal of vacuum science and technology, B, Nanotechnology & microelectronics |
| Klíč. název |
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print) |
| Klíč. název |
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online) |
| Vydavatel |
New York : American Institute of Physics, 2010- |
| ISSN |
2166-2746 print |
| ISSN |
2166-2754 online |
| Obor |
věda a technika ve - PSH |
| Obor |
fyzika fy - PSH |
| Dříve jako |
Journal of vacuum science & technology. B, Microelectronics and nanometer structures, ISSN 1071-1023 |
| Odběr |
ULD001 [i]: 2010-2011 |
| Online |
ABA013 [i]: 2014-2019 |
| Online |
ABD010 [i]: 2010-2025 |