-----nas  22-----zu 4500
001 SKVPK0025703
003 CZ-VPK
005 20150715135121.0
008 250327u2010uuuu||||| | |||  ||   |||||||
022   $a2166-2746$bprint
022   $a2166-2754$bonline
040   $aABA013$bcze
222  0$aJournal of vacuum science and technology. B, Nanotechnology & microelect
      ronics$b(Print)
222  0$aJournal of vacuum science and technology. B, Nanotechnology & microelect
      ronics$b(Online)
245 00$aJournal of vacuum science and technology.$pB, Nanotechnology & microelec
      tronics
260   $aNew York :$bAmerican Institute of Physics,$c2010-
650 07$avěda a technika$xve$2psh
650 07$afyzika$xfy$2psh
780 00$tJournal of vacuum science & technology. B, Microelectronics and nanomete
      r structures$x1071-1023
910   $aULD001$r2010-2011
990   $aABA013$r2014-2019
990   $aABD010$r2010-2025