-----nas  22-----zu 4500
001 SKVPK0008066
003 CZ-VPK
005 20150202145234.0
008 230425d19641982||||| | |||  ||   |||||||
022   $a0022-5355
040   $aABA013$bcze
222  0$aJournal of vacuum science & technology
245 00$aJournal of vacuum science and technology
260   $aNew York :$bAmerican Institute of Physics,$c1964-1982
650 07$atechnika$xve$2psh
785 00$tJournal of vacuum science & technology. A. Vacuum, surfaces, and films$x
      0734-2101
785 00$tJournal of vacuum science & technology. B, Microelectronics and nanomete
      r structures$x1071-1023
910   $aABA013$r1965-1982
990   $aABD010$r1964-1982