-----nas  22-----zu 4500
001 SKVPK0004709
003 CZ-VPK
005 20100802101110.0
008 150513u1998uuuu||||| | |||  ||   |||||||
022   $a1369-8001
040   $aABA013$bcze
222  0$aMaterials science in semiconductor processing
245 00$aMaterials science in semiconductor processing
260   $aOxford :$bPergamon,$c1998-
650 07$aelektronika$xel$2psh
650 07$afyzika$xfy$2psh
910   $aABA013$bR 14477$r2000-2008
990   $aABA007$r1998-2008
990   $aABA009$r1998-2013
990   $aABA013$r1998-2008
990   $aABB046$r1998-2007
990   $aPNA001$r1998-2008