-----nas  22-----zu 4500
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003 CZ-VPK
005 20141125093359.0
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022   $a1537-1646$bprint
022   $a1817-6461$bonline
040   $aABA013$bcze
222  0$aJournal of microlithography, microfabrication, and microsystems
222  0$aJournal of microlithography, microfabrication, and microsystems$b(Online
      )
245 00$aJournal of microlithography, microfabrication, and microsystems
260   $aBellingham :$bSPIE-The International Society for Optical Engineering,$c2
      002-2006
650 07$afyzika$xfy$2psh
650 07$aelektrotechnika$xet$2psh
785 00$tJournal of micro/nanolithography, MEMS, and MOEMS$x1932-5150