-----nas  22-----zu 4500
001 SKVPK0021090
003 CZ-VPK
005 20101210143354.0
008 221108u2007uuuu||||| | |||  ||   |||||||
022   $a1932-5150$bprint
022   $a1932-5134$bonline
040   $aABA013$bcze
222  0$aJournal of micro/nanolithography, MEMS, and MOEMS
222  0$aJournal of micro/nanolithography, MEMS, and MOEMS$b(Online)
245 00$aJournal of micro/nanolithography, MEMS, and MOEMS
260   $aBellingham :$bSPIE-The International Society for Optical Engineering,$c2
      007-
650 07$afyzika$xfy$2psh
650 07$aelektrotechnika$xet$2psh
780 00$tJournal of microlithography, microfabrication, and microsystems$x1537-16
      46
910   $aABA013$r2011-2014