-----nas  22-----zu 4500
001 SKVPK0001149
003 CZ-VPK
005 20150715141009.0
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022   $a1071-1023$bprint
022   $a1520-8567$bonline
040   $aABA013$bcze
222  0$aJournal of vacuum science & technology. B, Microelectronics and nanomete
      r structures
222  0$aJournal of vacuum science & technology. B, Microelectronics and nanomete
      r structures$b(Online)
245 00$aJournal of vacuum science & technology.$pB, Microelectronics and nanomet
      er structures
260   $aMelville :$bAmerican Institute of Physics,$c1983-2010
650 07$afyzika$xfy$2psh
650 07$apřírodní vědy$xve$2psh
650 07$avěda a technika$xve$2psh
780 00$tJournal of vacuum science and technology$x0022-5355
785 00$tJournal of vacuum science and technology. B, Nanotechnology & microelect
      ronics$x2166-2746
910   $aABA013$bR 13359$r1991-1996
910   $aULD001$r2003-2010
990   $aABD010$r1983-2010